Electrical Performance of Single and Multiple P-Channel FinFETs under Different VT Implant Energies with Temperature Stress
碩士 === 明新科技大學 === 電子工程系碩士班 === 103 === Through the fabrication of fin field-effect transistors (FinFET), the IC products can be effectively promoted in the high density, the high performance and the low cost. In FinFET structure, it is similar to a 3-D profile with channel width providing the three-...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/21358046977768014906 |