Processing Optimization and Device Characteristics studies of a-IGZO Thin-Film Transistors
碩士 === 明新科技大學 === 電子工程系碩士班 === 103 === The study was focused on indium gallium zinc oxide (In-Ga-Zn-O, IGZO) thin film deposited at various powers and high-temperature N2 annealing on the glass substrate by using RF magnetron sputtering system. IGZO film characteristics were analysed by ellipsometer...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/69350602654565480687 |