Fabrication and Improved Reliability of Si Bump Stop for Microelectromechanical Systems Sensor Applications
碩士 === 明新科技大學 === 化學工程與材料科技系碩士在職專班 === 103 === In this thesis, a CMOS device based on T company 180 nm technology node design rule with one poly-Si gate and six metal layers was chosen as the subject. The CMOS servers as a control device, which was integrated to a 6-axis sensor through wafer bondi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26431043638834327054 |