Effects of radio-frequency powers on properties of p-type amorphous cobalt carbon thin film alloys prepared by reactive sputtering deposition
碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === This study prepares p-type amorphous cobalt carbon (a-CoC) thin film alloys at different radio-frequency (RF) powers using reactive sputtering deposition, and investigates the microstructures, optical, and electrical properties of a-CoC thin film alloys. More...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79528021435165084663 |