Microstructure and characteristics of Si-doped (TiZrHf)N coatings by co-sputtering
碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === In recent years, the transition metal nitride film has been widely used for protecting the surface of the materials and improving the life time of molds and cutting tools. The molds require higher hardness, toughness and adhesion in the future. Considering th...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/71349941345063509454 |