Microstructure and characteristics of Si-doped (TiZrHf)N coatings by co-sputtering

碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === In recent years, the transition metal nitride film has been widely used for protecting the surface of the materials and improving the life time of molds and cutting tools. The molds require higher hardness, toughness and adhesion in the future. Considering th...

Full description

Bibliographic Details
Main Authors: Chai-Tai Tsao, 曹家泰
Other Authors: Fu-Sheng Shieu
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/71349941345063509454