A study of Scanning Capacitance Microscopy on p-n junction
碩士 === 國立中興大學 === 物理學系所 === 103 === Scanning capacitance microscopy (SCM) observes carrier concentration distributions of semiconductors. The SCM signal is highly sensitive to the variation of the active dopant concentration in semiconductor. SCM can be applied to local scanning and analysis as well...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64930585857784447402 |