Integrated Gas Microsensors Array with Circuits on a Chip
博士 === 國立中興大學 === 機械工程學系所 === 103 === This study illustrates an integrated gas microsensors array chip fabricated using the standard 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip includes four gas sensors, four readout circuits and thermometers. The objectives of this stud...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/65522409721908871607 |