Preparation and Characterization ofTi and F Co-doped ZnO Thin Films
碩士 === 國立中興大學 === 電機工程學系所 === 103 === This study Titanium and Fluorine co-doped ZnO thin film with varying CF4 content on Corning EagleXG glass were prepared by ratio frequency magnetron sputter using 1.5 wt% TZO target, RF power 50 W, working pressure 5×10-3 Torr. The impact of the CF4 content on t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12452351271222296790 |