Study Of High Sensitivity In-Ga-Zn-O Thin Film Gas Sensor
碩士 === 國立中興大學 === 奈米科學研究所 === 103 === In this experiment, indium gallium zinc oxide (IGZO) thin film were deposited by RF magnetron sputtering system and used in gas sensor which try to measure different kinds of gas. Because the adsorption and desorption of gas will change the electrical propert...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57880490511023388603 |