A Simulation-Optimization Approach for Workstation Number Planning at Semiconductor Wafer Fabrication Systems

碩士 === 國立成功大學 === 土木工程學系 === 103 === The semiconductor manufacturing factory is a very complicated place. In this thesis we develop a simulation- and Genetic Algorithm-based optimization method to systematically solve for an ideal number of workstations deployed for each tool groups. A three-layered...

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Bibliographic Details
Main Authors: Po-JyunChiou, 邱柏鈞
Other Authors: Yu-Sin Lee
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/22790138373455364636