Investigation of MgZnO-based metal-semiconductor-metal ultraviolet photodetectors with nanomesh electrode
碩士 === 國立成功大學 === 微電子工程研究所 === 103 === In this study, the nanosphere lithography technique and the oblique evaporation method were utilized to fabricate the high transmittance and low sheet resistance nanomesh electrode, and the high quality MgZnO-based films were deposited as the absorption layer u...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80061969424882749533 |