Investigation of Indium-Gallium-Oxide (In-Ga-O) Thin Film Transistors and Optoelectronic Applications
碩士 === 國立成功大學 === 微電子工程研究所 === 103 === In this thesis, we use In-Ga-O thin film as active layer to fabricate and investigate thin film transistors and UV phototransistor. Firstly, we deposit and analyze In-Ga-O thin films, and In-Ga-O thin films show amorphous structure and smooth surface. And the...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/kzm88p |