Investigative Analyses of GaN-based Multimode Interference (MMI) Couplers and Ring Resonators
碩士 === 國立成功大學 === 微電子工程研究所 === 103 === Mode converter and ring resonator are fabricated on the GaN wafer. Both of the devices are composed of several MMI waveguides and fabricated by ICP-RIE dry etching. We measure the characteristic of the device by CCD camera and the optical spectrum analyzer. Fir...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20449296999658036903 |