Study on New RF Power Matching State Detector of Impedance Matching Box for Plasma Chamber
碩士 === 國立成功大學 === 電機工程學系 === 103 === The purpose of this thesis is to present a radio frequency (RF) power matching state detector of impedance matching box for plasma chamber. The thesis proposed RF power detecting mechanism designing at 13.56 MHz as the impedance is 50 ohms called matching state....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4cjha3 |