Studies on Electrochemical and Barrier Properties of Ruthenium-tungsten and Molybdenum-tungsten Barrier Layers for Advanced Cu Metallization
碩士 === 國立成功大學 === 電機工程學系 === 103
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45918287641991710221 |