Beam pen lithography based on focused laser diode beam with single microlens fabricated by excimer laser
碩士 === 國立成功大學 === 機械工程學系 === 103 === This thesis propose a method for minimizing the focused spot size of an elliptically-diverging laser diode beam by means of a circular aperture and single plano-convex aspherical microlens. The proposed microlens is fabricated using an excimer laser dragging meth...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71986729954683033563 |