Intelligent Sampling Decision Scheme Based on the AVM System for Mass Production Applications
博士 === 國立成功大學 === 製造資訊與系統研究所 === 103 === Wafer inspection plays a significant role in monitoring the quality of wafers production for continuous improvement. However, it requires measuring tools and additional cycle time to do real metrology, which is costly and time-consuming. Therefore, reducing...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a52bt5 |