Influence of Annealing on The Properties of Tin Oxide Films Deposited at Low RF Power
碩士 === 國立暨南國際大學 === 應用材料及光電工程學系 === 103 === Tin oxide exists in two forms of stannous oxide/tin monoxide (SnO) and stannic oxide/tin dioxide (SnO2). There are few reports on its formation of single phase and/or growth of epitaxial/oriented thin film. The SnO films are deposited at low RF power using...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/thfmqb |