Low vacuum, room temperature radio frequency-plasma enhanced pulsed laser deposition of Indium Gallium Zinc Oxide (IGZO) thin film
碩士 === 國立暨南國際大學 === 光電科技碩士學位學程在職專班 === 103 === This research is using the Pulsed Laser Deposition Thin Film and Radio Frequency Plasma Laser Deposition to conduct oxygen flow quantity and processing power to control the deposition of IGZO thin film and to discuss the structure, morphology, character...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99527021620468227353 |