Mist Chemical Vapor Deposition of ZnO Thin Film on Sapphire
碩士 === 國立交通大學 === 材料科學與工程學系所 === 103 === Mist chemical vapor deposition (Mist-CVD) is a low cost, safe, low vacuum system demand, and simple green process. By this process, inexpensive and solid precursors in solution can be vaporized by ultrasonic, which enables deposition of ZnO (zinc oxide) at at...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49557961893256430506 |