A Study of Strain Effects on Nanoscale Silicon Transistors

博士 === 國立交通大學 === 電子物理系所 === 103 === The impact of strain effect on Zero-Temperature-Coefficient (ZTC) points of devices with various strain engineering technologies is presented in this dissertation. The degree of mobility reduction becomes severe on devices with multiple-strain gate engineering. T...

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Bibliographic Details
Main Authors: Chang,Tien-Shun, 張添舜
Other Authors: Chao, Tien-Sheng
Format: Others
Language:en_US
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/h7m24p