Mechanical property and crystallography of copper thin films and copper nano-twinned pillars
碩士 === 國立交通大學 === 電子物理系所 === 103 === We investigate mechanical properties of copper thin films, the hardness, stiffness and Young’s modulus, in nano-scale using nano-indentation which records load and displacement accurately and simultaneously. . We discuss the creep on the copper thin films which i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s49r6a |