High Mobility of Low Temperature GaN Grown by Two Heater MOCVD
碩士 === 國立交通大學 === 電子物理系所 === 103 === In this theses, we use the home-made two heater MOCVD reactor to grow low-growth temperature GaN thin films at 850℃. The electrical and optical properties of the samples were investigated by Hall, Temperature dependent Hall, X-ray diffraction and photoluminescenc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31349271360461005870 |