Optimization on self-organized Ge-nanoball/SiO2/SiGe gate-stacking heterostructure with interface engineering
碩士 === 國立中央大學 === 電機工程學系 === 103 === In this thesis, we demonstrated a unique approach to generate a self-organized Ge-nanoball/SiO2/SiGe heterostructure on the Si substrate through the selective oxidation of poly-Si0.83Ge0.17 nano-pillar over buffer layers of Si3N4 that were deposited over the Si s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26444249268118599342 |