Fabrication and Characterization of CMOS Compatible Poly-Si/SiGe Thermoelectric Microcoolers
碩士 === 國立中央大學 === 電機工程學系 === 103 === Silicon and germanium are the best semiconductor material choices for the integrated circuit for their material robustness and the fabrication process compatibility. Therefore, placement of SiGe thermoelectric microcoolers into integrated circuits to cool local h...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42609737992501356712 |