Development and Optimization of Silicon-based Thin Films for Their Applications in Ultra-Shallow Junction and Heterojunction Silicon-based Solar Cells
博士 === 國立中央大學 === 光電科學與工程學系 === 103 === For conventional c-Si solar cells, the doping profile of boron or phosphorous is usually more than 0.5 μm depth by diffusion process, hence the doped epi-Si thin films with abrupt ultra-shallow doping profile were investigated in this thesis. Furthermore, in o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51152070168896711280 |