Three-dimensional Optical Path on Silicon Optical Bench with Cantilever Waveguide Sensing Element
碩士 === 國立中央大學 === 光電科學與工程學系 === 103 === In research area of cantilever sensing element, most of approaches are based on the methodology of fiber-to-fiber coupling, which is unsuitable for the integration of laser source and photodetector (PD) into the platform of cantilever structure. In this thesis...
Main Authors: | , |
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Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/mp5e93 |