Monolithic Integration of Photo-detector on Silicon Optical Bench with Acoustic Sensing Membrane
碩士 === 國立中央大學 === 光電科學與工程學系 === 103 === In this research, we proposed a guided-wave silicon optical bench, which successfully integrates VCESL, sensing membrane and photo-detector for photo-acoustic sensor application. Such a optical bench has advantages including: high assembly tolerance, low optic...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38d32g |