Optical monitoring system for optical coater
碩士 === 國立中央大學 === 光電科學與工程學系 === 103 === In this thesis, we use halogen lamp as light source to measure thickness of film. Our system is constructed two conjugate systems. In the first system, the light source is focused on sample. In the second system, imaging light spot which is from sample into th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80964252127004357587 |