| Summary: | 碩士 === 國立中央大學 === 光電科學與工程學系 === 103 === In this thesis, we use halogen lamp as light source to measure thickness of film. Our system is constructed two conjugate systems.
In the first system, the light source is focused on sample. In the second
system, imaging light spot which is from sample into the fiber and transporting it to spectrometer to analysis the effect of film.
The size of coator is main point to conern with most of energy
loss. When diameter of spot size is 2mm, energy loss is 90.17％,diameter of spot size is 6.3mm, energy loss is 55.5％ and diameter of spot size is 5.3mm, energy loss is 40.3％ I control the diameter of light spot is 2mm on the sample to capture effect of film.
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