Investigation of ultra-thin intrinsic hydrogenated amorphous silicon (a-Si:H) films with high quality passivation prepared by PECVD
碩士 === 國立中央大學 === 照明與顯示科技研究所 === 103 === In this study, the intrinsic hydrogenated amorphous silicon (a-Si:H) thin films in heterojunction with intrinsic thin layer (HIT) solar cell was prepared by Plasma Enhanced Chemical Vapor Deposition (PECVD). PECVD has several advantages, such as stable depo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07208096229943937379 |