Investigation of ultra-thin intrinsic hydrogenated amorphous silicon (a-Si:H) films with high quality passivation prepared by PECVD
碩士 === 國立中央大學 === 照明與顯示科技研究所 === 103 === In this study, the intrinsic hydrogenated amorphous silicon (a-Si:H) thin films in heterojunction with intrinsic thin layer (HIT) solar cell was prepared by Plasma Enhanced Chemical Vapor Deposition (PECVD). PECVD has several advantages, such as stable depo...
Main Authors: | Pei-Shen Wu, 吳培慎 |
---|---|
Other Authors: | Jenq-Yang Chang |
Format: | Others |
Language: | zh-TW |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/07208096229943937379 |
Similar Items
-
Hydrogenated Amorphous Silicon Films Prepared by RF SiH4-PECVD System
by: Chieh Li, et al.
Published: (2009) -
Amorphous Silicon Thin Film Solar Cells Prepared by RF SiH4-PECVD System
by: Shou- cheng Chou, et al.
Published: (2011) -
Amorphous Silicon Thin Film Solar Cells Prepared by RF SiH4-PECVD System
by: Ya-Qin Huang, et al.
Published: (2010) -
Machine learning of In-situ plasma monitoring in PECVD deposited amorphous (a-Si:H) passivation film
by: Hung-Jui Huang, et al.
Published: (2018) -
Microcrystalline Silicon Films Prepared by VHF SiH4-PECVD System
by: Zong-lin Chen, et al.
Published: (2008)