Research on Novel Low Damping CMOS-MEMS Accelerometer and Gyroscope
碩士 === 國立彰化師範大學 === 機電工程學系所 === 103 === Nowadays, the industry of micromechanical with outstanding advances in semiconductor process develops rapidly. Micro-accelerometers and gyroscopes will rise slightly. Application of this new technology enables miniaturize products in nanometer , and at the sa...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/47170937070301065356 |