A Multi-level Force-Feedback CTV-Based Analog Sensing Circuits with Delta-Sigma Modulator for CMOS Micro-Accelerometers
碩士 === 國立嘉義大學 === 電機工程學系研究所 === 103 === In this work, a CMOS (Complementary Metal Oxide Semiconductor) MEMS (Micro Electro Mechanical Systems) open-loop/multi-level force-feedback accelerometer is newly proposed. The proposed chip is attractive due to the fact that all the circuits and the sensor ca...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/09424556989699696671 |