Reactive co-sputtered boron doped titania thin films as a photocatalyst.
碩士 === 國立東華大學 === 材料科學與工程學系 === 103 === In this study, two series of pure and boron-doped titania thin films were prepared in a reactive magnetron sputtering system by co-sputtering Ti and TiB2 targets in oxygen and argon plasma at 100 ℃. Subsequently the films were annealed at 600 ℃ in atmosphere f...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/53220980178009624739 |