Structural disorders and luminescent properties of ZnO prepared by reactive sputtering

碩士 === 國立東華大學 === 物理學系 === 103 === In this work effects of nitrogen content (N-content) of the ambient gas used in reactive sputtering of ZnO and that of post-deposition annealing have been investigated. Characterizations of the as-deposited and annealed films have been performed using scanning elec...

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Bibliographic Details
Main Authors: Chih-Chung Hsieh, 謝至中
Other Authors: Yue-Lin HUANG
Format: Others
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/59325668633075391999