Structural disorders and luminescent properties of ZnO prepared by reactive sputtering
碩士 === 國立東華大學 === 物理學系 === 103 === In this work effects of nitrogen content (N-content) of the ambient gas used in reactive sputtering of ZnO and that of post-deposition annealing have been investigated. Characterizations of the as-deposited and annealed films have been performed using scanning elec...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/59325668633075391999 |