Study the mechanical properties of TiN/AlN multilayer coatings using the unbalanced magnetron sputtering process
碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 103 === This experiment is to coating the multilayers of TiN/AlN on surface of high-speed steel SKH51 by using the method of unbalanced magnetron sputtering with an interlayer of Titanium. The purpose is to searching the influence of the multilayers’ mechanical...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76236703851011844204 |