Study on Efficiency of Different Treatment Technology on Removing VOCs from Assembly Industry
碩士 === 國立中山大學 === 海洋環境及工程學系研究所 === 103 === Base on the Taiwan Semiconductor Industry Association 2014 statistics, IC manufacturing output of up to 22,033 hundred million NTD, more than growth of 16.7% with 2013. High-tech process required to use a lot of volatile organic solvent, that may derive the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/hhf4t7 |