Study on Comparing WO3 &; W18O49 Gas Sensing Abilities under NO2 Environment
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 103 === In this study, tungsten films (150 and 300 nm thick) by DC magnetron sputtering were made, and annealing treatment at 700°C environment was used to discuss the influence of annealing duration (30, 45, 60, 75 and 90 mins) on the morphology, phase and microst...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6pv9bs |