A study of ZnO thin film deposition and its optoelectronic applications
博士 === 國立清華大學 === 材料科學工程學系 === 103 === Abstract In this thesis, we report a study of ZnO thin film deposition method cooperating with Industrial Technology Research Institute (ITRI). Our target is trying to find the most proper deposition parameter and ZnO thin film optoelectronic properties for so-...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/26859884760168285716 |