Target Preparation and Thin Film Deposition of Novel Sn-Mn-Ni Based Oxide
碩士 === 國立清華大學 === 材料科學工程學系 === 103 === In this work, novel, stable and environmentally friendly Sn-Mn-Ni based oxide targets were prepared and their thin films were deposited by e-beam evaporation and RF sputtering. After that, feasibilities for optoelectronic applications were discussed. E-beam eva...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/j4vma8 |