Measurement of residual stress of TiZrN thin films by combining average X-ray strain (AXS) and nanoindentation methods
碩士 === 國立清華大學 === 工程與系統科學系 === 103 === In this study, we proposed a standard procedure to measure the stress of polycrystalline Ti1-xZrxN thin films by using average X-ray strain (AXS) method. The objective was to narrow down the deviation of stress measurement to 10%, and to find the thickness limi...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/61475170194765289123 |