Design and Implementation of MEMS Vibratory Gyroscopes
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 103 === This work reports the design, simulation, fabrication, and measurement of MEMS vibratory gyroscopes. The relationship between specification and parameters is also discussed from the viewpoint of the whole system. The first design, Filter-Sensing Mode Gyrosco...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30211092867910547523 |