MOCVD Exhaust Heat Recovery System of Light-emitting Diode Industry
碩士 === 國立臺南大學 === 綠色能源學科技學系碩士在職專班 === 103 === As the semiconductor industry consist a wide range of process, waste heat generated, acid, alkaline and organic solvents gas in the production process must be uninterrupted use of the exhaust system pumping. Most of require exhaust pollution control equi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89491044581863119552 |