Adaptive Tilting Angles to Achieve High-Precision Scanning of a Dual-Probe AFM
碩士 === 國立臺灣大學 === 電機工程學研究所 === 103 === With the deep development of micro- and nano- frabricated techniques, the feature size of the sample has become smaller and smaller. There is an important issue to measure this kind of small object in nano-scale. Atomic force microscopy (AFM) is a powerful meas...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34668836409648637334 |