A study on SnO thin films and SnO diodes using infrared rapid thermal annealing process
碩士 === 國立臺灣大學 === 應用力學研究所 === 103 === This thesis reports the tin monoxide (SnO) thin films that were deposited by RF-sputtering technique and post-annealed by infrared rapid thermal furnace (hereafter referred to as RTA). We investigated the crystallinity, surface morphology, chemical composition,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05879170280265527968 |