Properties of Aluminum Nitride and Zirconium Nitride Thin Films by Nitrogen Flow Control
碩士 === 國立臺灣科技大學 === 機械工程系 === 103 === The purpose of this study is to design a ceramic thin film to substitute the polymer resist used in LIGA process. The ceramic thin films must have the following characteristics: Resistivity – To prevent electroformed metal deposition on the die. Mechanical pro...
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| Format: | Others |
| Language: | zh-TW |
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2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81646355149198954259 |