Analysis on Diamond Wire Sawing Process of Single Crystalline Silicon Carbide Wafer
碩士 === 國立臺灣科技大學 === 機械工程系 === 103 === Single crystalline silicon carbide has become an important material in power device due to its material properties of low power consumption and stability in high temperature. However, its high hardness and chemical resistance induce the difficulty of fabrication...
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| Format: | Others |
| Language: | zh-TW |
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2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40185479765308605983 |