Deposition of IGZO Single-Layer and Multi-Layer Thin Films and Their Applications in the Fabrication of Devices
碩士 === 國立高雄大學 === 化學工程及材料工程學系碩士班 === 103 === In this study, single layer IGZO thin films and multi-layers of IGZO/Ag/IGZO thin films were deposited onto glass substrates at room temperature by using radio frequency magnetron sputtering. We expect being able to produce transparent conducting films wi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10757424815005793088 |