Nested Folded-Beam Suspensions For Comb-Drive Actuators
碩士 === 國立聯合大學 === 機械工程學系碩士班 === 103 === Nested folded-beam suspensions with a low lateral spring constant and a high longitudinal spring constant have been used in comb-drive actuators. In the new design, every two flexible beams and two stiff members form a parallelogram flexure, which is considere...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63846403194407364484 |